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Influence of the nonlinearity introduced by the Casimir force on the harmonic behavior of MEM resonators

dc.contributor.authorZanaty, Mohamed
dc.contributor.authorJansen, Roelof
dc.contributor.authorAbbas, Mohamed
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-20T19:29:12Z
dc.date.available2021-10-20T19:29:12Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21907
dc.sourceIIOimport
dc.titleInfluence of the nonlinearity introduced by the Casimir force on the harmonic behavior of MEM resonators
dc.typeMeeting abstract
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.conference2nd Saudi International Nano-technology Conference
dc.source.conferencedate11/11/2012
dc.source.conferencelocationRiyadh Saudi Arabia
imec.availabilityPublished - imec


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