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Wafer scale fabrication of miniature vacuum packages for MEMS/NEMS using thin membranes of nanoporous alumina

dc.contributor.authorZekry, Joseph
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-20T19:30:51Z
dc.date.available2021-10-20T19:30:51Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21910
dc.sourceIIOimport
dc.titleWafer scale fabrication of miniature vacuum packages for MEMS/NEMS using thin membranes of nanoporous alumina
dc.typeOral presentation
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecVan Hoof, Chris::0000-0002-4645-3326
dc.source.peerreviewno
dc.source.conferenceWilhelm and Else Heraeus Physics School "Microelectronics for Society - More than Moore expands More Moore"
dc.source.conferencedate10/06/2012
dc.source.conferencelocationBad Honnef Germany
imec.availabilityPublished - imec


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