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Scalability of doped cubic HfO2 films

dc.contributor.authorAdelmann, Christoph
dc.contributor.authorOpsomer, Karl
dc.contributor.authorBrizzi, Simone
dc.contributor.authorTallarida, Massimo
dc.contributor.authorSchmeisser, Dieter
dc.contributor.authorSchram, Tom
dc.contributor.authorChew, Soon Aik
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorRagnarsson, Lars-Ake
dc.date.accessioned2021-10-21T06:42:03Z
dc.date.available2021-10-21T06:42:03Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21951
dc.sourceIIOimport
dc.titleScalability of doped cubic HfO2 films
dc.typeMeeting abstract
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.source.peerreviewno
dc.source.beginpage62
dc.source.conferenceAVS 60th International Symposium & Exhibition
dc.source.conferencedate27/10/2013
dc.source.conferencelocationLong Beach, CA USA
dc.identifier.urlhttp://www2.avs.org/symposium/avs60/pdfs/abstractbook.pdf
imec.availabilityPublished - imec


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