Authors

Afanasiev, Valeri; Nguyen, A.; Houssa, M.; Stesmans, Andre; Tokei, Zsolt; Baklanov, Mikhaïl

ISSN

0003-6951

Issue

17

Journal

Applied Physics Letters

Volume

102

Title

High-resolution electron spin resonance analysis of ion bombardment induced defects in advanced low-k insulators (k=2.0-2.5)

Publication type

Journal article

Embargo date

9999-12-31