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Design improvements for an electret-based MEMS vibrational electrostatic energy harvester

dc.contributor.authorAltena, Geert
dc.contributor.authorRenaud, Michael
dc.contributor.authorElfrink, Rene
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorde Nooijer, Christine
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-21T06:42:25Z
dc.date.available2021-10-21T06:42:25Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21969
dc.sourceIIOimport
dc.titleDesign improvements for an electret-based MEMS vibrational electrostatic energy harvester
dc.typeProceedings paper
dc.contributor.imecauthorElfrink, Rene
dc.contributor.imecauthorde Nooijer, Christine
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage12078
dc.source.conferenceProceedings 13th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS
dc.source.conferencedate3/12/2013
dc.source.conferencelocationLondon UK
dc.identifier.urlhttp://iopscience.iop.org/1742-6596/476/1/012078
imec.availabilityPublished - open access
imec.internalnotesJournal of Physics. Conference Series. Vol. 476


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