Show simple item record

Smart neuroprobes with disposable micromachined shank protection defined at wafer level

dc.contributor.authorAndrei, Alexandru
dc.contributor.authorMora Lopez, Carolina
dc.contributor.authorSoussan, Philippe
dc.date.accessioned2021-10-21T06:42:39Z
dc.date.available2021-10-21T06:42:39Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21977
dc.sourceIIOimport
dc.titleSmart neuroprobes with disposable micromachined shank protection defined at wafer level
dc.typeProceedings paper
dc.contributor.imecauthorAndrei, Alexandru
dc.contributor.imecauthorMora Lopez, Carolina
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.orcidimecMora Lopez, Carolina::0000-0003-4200-0001
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage3
dc.source.conferenceEuropean Microelectronics Packaging Conference - EMPC
dc.source.conferencedate9/09/2013
dc.source.conferencelocationGrenoble France
dc.identifier.urlhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6698637&tag=1
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
27178.pdf
Size:
1.366Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record