Nanoprober-based EBIC measurements for nanowire transistor structures

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Authors

Arstila, Kai; Hantschel, Thomas; Schulze, Andreas; Vandooren, Anne; Verhulst, Anne; Rooyackers, Rita; Eyben, Pierre; Vandervorst, Wilfried

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

105

Title

Nanoprober-based EBIC measurements for nanowire transistor structures

Publication type

Journal article

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