Multi-response optimization of ultrathin poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique
dc.contributor.author | Asafa, Tesleem | |
dc.contributor.author | Bryce, George | |
dc.contributor.author | Said, Syed | |
dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Severi, Simone | |
dc.date.accessioned | 2021-10-21T06:43:13Z | |
dc.date.available | 2021-10-21T06:43:13Z | |
dc.date.issued | 2013 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21992 | |
dc.source | IIOimport | |
dc.title | Multi-response optimization of ultrathin poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique | |
dc.type | Journal article | |
dc.contributor.imecauthor | Bryce, George | |
dc.contributor.imecauthor | Severi, Simone | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 229 | |
dc.source.endpage | 233 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.volume | 111 | |
imec.availability | Published - open access |