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Multi-response optimization of ultrathin poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique

dc.contributor.authorAsafa, Tesleem
dc.contributor.authorBryce, George
dc.contributor.authorSaid, Syed
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.date.accessioned2021-10-21T06:43:13Z
dc.date.available2021-10-21T06:43:13Z
dc.date.issued2013
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21992
dc.sourceIIOimport
dc.titleMulti-response optimization of ultrathin poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique
dc.typeJournal article
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorSeveri, Simone
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage229
dc.source.endpage233
dc.source.journalMicroelectronic Engineering
dc.source.volume111
imec.availabilityPublished - open access


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