Publication:
Multi-response optimization of ultrathin poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique
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1922 since deposited on 2021-10-21
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Acq. date: 2026-10-07
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Statistics
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1922 since deposited on 2021-10-21
2last month
2last week
Acq. date: 2026-10-07
Citations