Publication:
Multi-response optimization of ultrathin poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique
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1920 since deposited on 2021-10-21
3last month
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Acq. date: 2026-08-09
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Statistics
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1920 since deposited on 2021-10-21
3last month
1last week
Acq. date: 2026-08-09
Citations