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Multi-response optimization of ultrathin poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique
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1916 since deposited on 2021-10-21
Acq. date: 2025-12-13
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1916 since deposited on 2021-10-21
Acq. date: 2025-12-13
Citations