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TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

dc.contributor.authorBarozzi, Mario
dc.contributor.authorIacob, Erica
dc.contributor.authorvan den Berg, Jaap A.
dc.contributor.authorReading, Michael A.
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorTielens, Hilde
dc.contributor.authorBersani, Massimo
dc.date.accessioned2021-10-21T06:44:38Z
dc.date.available2021-10-21T06:44:38Z
dc.date.issued2013
dc.identifier.issn0142-2421
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22019
dc.sourceIIOimport
dc.titleTiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM
dc.typeJournal article
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorTielens, Hilde
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage394
dc.source.endpage397
dc.source.journalSurface and Interface Analysis
dc.source.issue1
dc.source.volume45
imec.availabilityPublished - open access


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