Authors

Camerotto, Elisabeth; Brems, Steven; Hauptmann, Marc; Lurquin, Jelle; Struyf, Herbert; Mertens, Paul; De Gendt, Stefan

Conference

Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS

Title

Towards an improved megasonic cleaning process: influence of surface tension on bubble activity in acoustic fields

Publication type

Proceedings paper

Embargo date

9999-12-31