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RTN assessment of traps in polysilicon cylindrical vertical FETs for NVM application

dc.contributor.authorCano de Andrade, Gloria
dc.contributor.authorToledano Luque, Maria
dc.contributor.authorFourati, Fatma
dc.contributor.authorDegraeve, Robin
dc.contributor.authorMartino, Joao Antonio
dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-21T06:52:10Z
dc.date.available2021-10-21T06:52:10Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22098
dc.sourceIIOimport
dc.titleRTN assessment of traps in polysilicon cylindrical vertical FETs for NVM application
dc.typeMeeting abstract
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage94
dc.source.endpage95
dc.source.conference18th Conference of Insulting Films on Semiconductors - INFOS: Book of Abstracts
dc.source.conferencedate25/06/2013
dc.source.conferencelocationCracow Poland
imec.availabilityPublished - open access


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