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RTN assessment of traps in polysilicon cylindrical vertical FETs for NVM application

dc.contributor.authorCaño de Andrade, Maria Glória
dc.contributor.authorToledano Luque, Maria
dc.contributor.authorFourati, Fatma
dc.contributor.authorDegraeve, Robin
dc.contributor.authorMartino, Joao Antonio
dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-21T06:52:17Z
dc.date.available2021-10-21T06:52:17Z
dc.date.issued2013
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22099
dc.sourceIIOimport
dc.titleRTN assessment of traps in polysilicon cylindrical vertical FETs for NVM application
dc.typeJournal article
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage105
dc.source.endpage108
dc.source.journalMicroelectronic Engineering
dc.source.volume109
imec.availabilityPublished - open access
imec.internalnotesINFOS 2013 paper


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