The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM

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Authors
Celano, Umberto; Chintala, Ravi Chandra; Adelmann, Christoph; Richard, Olivier; Vandervorst, Wilfried
Conference
18th Conference of Insulting Films on Semiconductors - INFOS: Book of Abstracts
Title
The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM
Publication type
Proceedings paper
Embargo date
9999-12-31
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