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Damage-free contact mode current sensing SPM: benchmarking PFTUNA vs. C-AFM

dc.contributor.authorCelano, Umberto
dc.contributor.authorChintala, Ravi Chandra
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorMoussa, Alain
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorMannarino, Manuel
dc.contributor.authorNazir, Aftab
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T06:53:54Z
dc.date.available2021-10-21T06:53:54Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22112
dc.sourceIIOimport
dc.titleDamage-free contact mode current sensing SPM: benchmarking PFTUNA vs. C-AFM
dc.typeOral presentation
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorNazir, Aftab
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.source.peerreviewno
dc.source.conferenceSPM Dutch User Meeting 2013
dc.source.conferencedate26/05/2013
dc.source.conferencelocationEindhoven Nederlands
imec.availabilityPublished - imec


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