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Inorganic material profiling using Arn + cluster: Can we achieve high Quality profiles?

dc.contributor.authorConard, Thierry
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorHavelund, R.
dc.contributor.authorFranquet, Alexis
dc.contributor.authorPoleunis, Claude
dc.contributor.authorDelcorte, Aranaud
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T07:01:45Z
dc.date.available2021-10-21T07:01:45Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22165
dc.sourceIIOimport
dc.titleInorganic material profiling using Arn + cluster: Can we achieve high Quality profiles?
dc.typeMeeting abstract
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.source.peerreviewno
dc.source.conferenceSIMS19
dc.source.conferencedate28/09/2013
dc.source.conferencelocationJeju Korea
imec.availabilityPublished - imec


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