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Low temperature CNT growth for BEOL interconnects

dc.contributor.authorCott, Daire
dc.contributor.authorMasahito, Sugiura
dc.contributor.authorVanpaemel, Johannes
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-21T07:03:53Z
dc.date.available2021-10-21T07:03:53Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22178
dc.sourceIIOimport
dc.titleLow temperature CNT growth for BEOL interconnects
dc.typeOral presentation
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewno
dc.source.conferenceMRS Fall Meeting
dc.source.conferencedate1/12/2013
dc.source.conferencelocationBoston USA
imec.availabilityPublished - imec
imec.internalnotesposter presentation on conference


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