CMOS compatible wafer scale adhesive bonding for circuit transfer

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Authors
van der Groen, Sonja; Rosmeulen, Maarten; Jansen, Philippe; Baert, Kris; Deferm, Ludo
Conference
International Conference on Solid-State Sensors and Actuators - Transducers
Title
CMOS compatible wafer scale adhesive bonding for circuit transfer
Publication type
Proceedings paper
Embargo date
9999-12-31
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