Authors

Cuypers, Daniel; De Gendt, Stefan; Arnauts, Sophia; Paulussen, Kris; van Dorp, Dennis

ISSN

2162-8769

Issue

4

Journal

ECS Journal of Solid State Science and Technology

Volume

2

Title

Wet chemical etching of InP for cleaning applications: I. An oxide formation/oxide dissolution model

Publication type

Journal article