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Gas sensing with atomic layer deposited dielectric thin film

dc.contributor.authorDam, Van Anh
dc.contributor.authorBlauw, Michiel
dc.contributor.authorRovers, Madelon
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-21T07:07:21Z
dc.date.available2021-10-21T07:07:21Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22199
dc.sourceIIOimport
dc.titleGas sensing with atomic layer deposited dielectric thin film
dc.typeProceedings paper
dc.contributor.imecauthorDam, Van Anh
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.source.peerreviewyes
dc.source.conferenceInternational Conference on Materials and Applications for Sensors and Transducers - ICMAST
dc.source.conferencedate13/09/2013
dc.source.conferencelocationPrague Czech Republic
imec.availabilityPublished - imec


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