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Conference contributions
Dedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devices
Publication:
Dedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devices
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Date
2013
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Coster, Jeroen
;
Ling, Fangzhou
;
Witvrouw, Ann
;
De Wolf, Ingrid
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1881
since deposited on 2021-10-21
Acq. date: 2026-08-05
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Views
1881
since deposited on 2021-10-21
Acq. date: 2026-08-05
Citations