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Dedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devices
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Authors
De Coster, Jeroen
;
Ling, Fangzhou
;
Witvrouw, Ann
;
De Wolf, Ingrid
Conference
17th International Conference on Solid-State Sensors, Actuators and Microsystems
Title
Dedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devices
Publication type
Proceedings paper
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