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Local stress measurements using Raman spectroscopy: Pitfalls and limitations

dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-21T07:12:32Z
dc.date.available2021-10-21T07:12:32Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22229
dc.sourceIIOimport
dc.titleLocal stress measurements using Raman spectroscopy: Pitfalls and limitations
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage227
dc.source.endpage231
dc.source.conferenceProceedings 5th MicroCar Conference
dc.source.conferencedate25/02/2013
dc.source.conferencelocationLeipzig Germnay
imec.availabilityPublished - open access
imec.internalnotesMicromaterials and Nanomaterials. Vol. 15(2013)


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