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Strength analysis of advanced node BEOL under CPI induced stresses

dc.contributor.authorDebecker, Bjorn
dc.contributor.authorVanstreels, Kris
dc.contributor.authorGonzalez, Mario
dc.contributor.authorVandevelde, Bart
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-21T07:13:27Z
dc.date.available2021-10-21T07:13:27Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22234
dc.sourceIIOimport
dc.titleStrength analysis of advanced node BEOL under CPI induced stresses
dc.typeProceedings paper
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.source.peerreviewyes
dc.source.conferenceIEEE Int. Conf on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsyst. - EuroSimE
dc.source.conferencedate15/04/2013
dc.source.conferencelocationWroclaw Poland
imec.availabilityPublished - imec


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