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Chemical vapour deposition of Si:C and Si:CP thin films using disilane
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Chemical vapour deposition of Si:C and Si:CP thin films using disilane
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Date
2013-10
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dhayalan, Sathish Kumar
;
Rosseel, Erik
;
Hikavyy, Andriy
;
Loo, Roger
;
Vandervorst, Wilfried
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1863
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Acq. date: 2025-12-16
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Metrics
Views
1863
since deposited on 2021-10-21
1
last month
Acq. date: 2025-12-16
Citations