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Foundry technology and services for si photonics

dc.contributor.authorDumon, Pieter
dc.contributor.authorKhanna, Amit
dc.date.accessioned2021-10-21T07:25:23Z
dc.date.available2021-10-21T07:25:23Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22292
dc.sourceIIOimport
dc.titleFoundry technology and services for si photonics
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageTuN2-3
dc.source.conference18th OptoElectronics and Communications Conference held jointly with International Conference on Photonics in Switching -OECC-PS
dc.source.conferencedate30/06/2013
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - open access
imec.internalnotes


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