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Tungsten planarization by gas cluster ion beam with CHF3

dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorFernandez, Luis
dc.contributor.authorVos, Ingrid
dc.contributor.authorVan Ammel, Annemie
dc.contributor.authorVrancken, Christa
dc.contributor.authorDekoster, Johan
dc.contributor.authorBurke, Edd
dc.contributor.authorVancoille, Eric
dc.date.accessioned2021-10-21T07:32:52Z
dc.date.available2021-10-21T07:32:52Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22325
dc.sourceIIOimport
dc.titleTungsten planarization by gas cluster ion beam with CHF3
dc.typeMeeting abstract
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorVan Ammel, Annemie
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorDekoster, Johan
dc.contributor.imecauthorVancoille, Eric
dc.source.peerreviewyes
dc.source.beginpage117
dc.source.endpage118
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate10/03/2013
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec
imec.internalnotesP4-10


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