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Sub-nanometer characterization of nanoelectronic devices

dc.contributor.authorEyben, Pierre
dc.contributor.authorMody, Jay
dc.contributor.authorNazir, Aftab
dc.contributor.authorSchulze, Andreas
dc.contributor.authorClarysse, Trudo
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T07:33:31Z
dc.date.available2021-10-21T07:33:31Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22328
dc.sourceIIOimport
dc.titleSub-nanometer characterization of nanoelectronic devices
dc.typeBook chapter
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorNazir, Aftab
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.bookFundamentals of Picoscience
dc.identifier.urlhttp://www.crcpress.com/product/isbn/9781466505094
imec.availabilityPublished - imec


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