Sub-nanometer characterization of nanoelectronic devices

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Authors
Eyben, Pierre; Mody, Jay; Nazir, Aftab; Schulze, Andreas; Clarysse, Trudo; Hantschel, Thomas; Vandervorst, Wilfried
Book
Fundamentals of Picoscience
Title
Sub-nanometer characterization of nanoelectronic devices
Publication type
Book chapter
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