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Novel Teeter-Totter 2-Axes MEMS magnetometer with equal sensitivities

dc.contributor.authorFarghaly, Mahmoud
dc.contributor.authorRochus, Veronique
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorMohammed, U.S.
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-21T07:34:42Z
dc.date.available2021-10-21T07:34:42Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22333
dc.sourceIIOimport
dc.titleNovel Teeter-Totter 2-Axes MEMS magnetometer with equal sensitivities
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conference14th Int. Conf on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsyst. - EuroSimE
dc.source.conferencedate15/04/2013
dc.source.conferencelocationWroclaw Poland
imec.availabilityPublished - open access


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