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Surface reactinivty of AIN thin films with ambient air and water

dc.contributor.authorFerraro, B.B.
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorConings, Bert
dc.contributor.authorBoyen, Hans-Gerd
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-21T07:36:08Z
dc.date.available2021-10-21T07:36:08Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22339
dc.sourceIIOimport
dc.titleSurface reactinivty of AIN thin films with ambient air and water
dc.typeOral presentation
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorConings, Bert
dc.contributor.imecauthorBoyen, Hans-Gerd
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XVIII
dc.source.conferencedate27/02/2013
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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