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Process tolerant design of BAW resonators via hole engineering

dc.contributor.authorFigeys, Bruno
dc.contributor.authorJansen, Roelof
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-21T07:36:47Z
dc.date.available2021-10-21T07:36:47Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22342
dc.sourceIIOimport
dc.titleProcess tolerant design of BAW resonators via hole engineering
dc.typeProceedings paper
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.conference17th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS
dc.source.conferencedate16/06/2013
dc.source.conferencelocationBarcelona Spain
imec.availabilityPublished - imec


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