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Au-free low temperature ohmic contacts for AlGaN/GaN power devices on 200 mm substrates

dc.contributor.authorFirrincieli, Andrea
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorYou, Shuzhen
dc.contributor.authorWellekens, Dirk
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorDecoutere, Stefaan
dc.date.accessioned2021-10-21T07:37:40Z
dc.date.available2021-10-21T07:37:40Z
dc.date.issued2013-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22346
dc.sourceIIOimport
dc.titleAu-free low temperature ohmic contacts for AlGaN/GaN power devices on 200 mm substrates
dc.typeProceedings paper
dc.contributor.imecauthorFirrincieli, Andrea
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorYou, Shuzhen
dc.contributor.imecauthorWellekens, Dirk
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.peerreviewyes
dc.source.beginpage914
dc.source.endpage915
dc.source.conferenceSolid State Devices and Materials Conference - SSDM
dc.source.conferencedate24/09/2013
dc.source.conferencelocationFukuoka Japan
imec.availabilityPublished - imec


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