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Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)

dc.contributor.authorFranquet, Alexis
dc.contributor.authorConard, Thierry
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T07:42:46Z
dc.date.available2021-10-21T07:42:46Z
dc.date.issued2013
dc.identifier.issn1742-6588
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22366
dc.sourceIIOimport
dc.titleThickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)
dc.typeJournal article
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage12033
dc.source.journalJournal of Physics Conference Series
dc.source.issue1
dc.source.volume417
imec.availabilityPublished - open access


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