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Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)
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Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)
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Date
2013
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Franquet, Alexis
;
Conard, Thierry
;
Gilbert, Matthieu
;
Hantschel, Thomas
;
Vandervorst, Wilfried
Journal
Journal of Physics Conference Series
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1811
since deposited on 2021-10-21
Acq. date: 2026-01-09
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Metrics
Views
1811
since deposited on 2021-10-21
Acq. date: 2026-01-09
Citations