Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)

dc.contributor.author	Franquet, Alexis
dc.contributor.author	Conard, Thierry
dc.contributor.author	Gilbert, Matthieu
dc.contributor.author	Hantschel, Thomas
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Franquet, Alexis
dc.contributor.imecauthor	Conard, Thierry
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Franquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimec	Conard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned	2021-10-21T07:42:46Z
dc.date.available	2021-10-21T07:42:46Z
dc.date.embargo	9999-12-31
dc.date.issued	2013
dc.identifier.issn	1742-6588
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/22366
dc.source.beginpage	12033
dc.source.issue	1
dc.source.journal	Journal of Physics Conference Series
dc.source.volume	417
dc.title	Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)
dc.type	Journal article
dspace.entity.type	Publication
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