Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Composition measurements of thin films beyond the spatial resolution of SIMS
Metadata
Show full item record
Authors
Franquet, Alexis
;
Douhard, Bastien
;
Delmotte, Joris
;
Merckling, Clement
;
Conard, Thierry
;
Vandervorst, Wilfried
Conference
19th International Conference on Secondary Ion Mass Spectrometry - SIMS19
Title
Composition measurements of thin films beyond the spatial resolution of SIMS
Publication type
Meeting abstract
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login