Publication:

Composition measurements of thin films beyond the spatial resolution of SIMS

Date

2013
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Author(s)

Franquet, Alexis  
;
Douhard, Bastien  
;
Delmotte, Joris
;
Merckling, Clement  
;
Conard, Thierry  
;
Vandervorst, Wilfried  

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1900 since deposited on 2021-10-21
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