Show simple item record

Layout-induced stress effects in 14nm & 10nm FinFETs and their impact on performance

dc.contributor.authorGarcia Bardon, Marie
dc.contributor.authorMoroz, Victor
dc.contributor.authorEneman, Geert
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorDehan, Morin
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorJang, Doyoung
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorThean, Aaron
dc.contributor.authorVerkest, Diederik
dc.contributor.authorSteegen, An
dc.date.accessioned2021-10-21T07:45:21Z
dc.date.available2021-10-21T07:45:21Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22375
dc.sourceIIOimport
dc.titleLayout-induced stress effects in 14nm & 10nm FinFETs and their impact on performance
dc.typeProceedings paper
dc.contributor.imecauthorGarcia Bardon, Marie
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageT114
dc.source.endpageT115
dc.source.conferenceSymposium on VLSI Technology
dc.source.conferencedate11/06/2013
dc.source.conferencelocationKyoto Japan
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6576617&queryText%3DLayout-induced+stress+effects+in+14nm
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
26151.pdf
Size:
1.427Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record