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Gas stream analysis and PFC recovery in a semiconductor process

dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorDaniels, Michael
dc.contributor.authorAnderson, Nigel
dc.contributor.authorFyen, Wim
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-30T09:51:22Z
dc.date.available2021-09-30T09:51:22Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2238
dc.sourceIIOimport
dc.titleGas stream analysis and PFC recovery in a semiconductor process
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage55
dc.source.endpage60
dc.source.conferenceEnvironmental, Safety, and Health Issues in IC Production
dc.source.conferencedate4/12/1996
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 447


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