Gripping-in-liquid: handling challenges for automated ultra-thin wafer production

Publication:

2013

Proceedings Paper

Author(s)

Giesen, Tim

;

Mayer, P.

;

Stiels, D.

;

Wertz, R.

;

Martini, Roberto

;

;

Verl, A.

1916 since deposited on 2021-10-21

2last month

Acq. date: 2026-01-07