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Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films

dc.contributor.authorGodavarthi, Srinivas
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorMardani, Shabnam
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVan Besien, Els
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-21T07:52:32Z
dc.date.available2021-10-21T07:52:32Z
dc.date.issued2013
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22403
dc.sourceIIOimport
dc.titleImpact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
dc.typeJournal article
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVan Besien, Els
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage134
dc.source.endpage137
dc.source.journalMicroelectronic Engineering
dc.source.volume107
imec.availabilityPublished - open access


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