Authors

Godavarthi, Srinivas; Le, Quoc Toan; Verdonck, Patrick; Mardani, Shabnam; Vanstreels, Kris; Van Besien, Els; Baklanov, Mikhaïl

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

107

Title

Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films

Publication type

Journal article

Embargo date

9999-12-31