Publication:
Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
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1890 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-11
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Views
1890 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-11
Citations