Publication:
Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
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1895 since deposited on 2021-10-21
3last month
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Acq. date: 2026-08-10
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Statistics
Views
1895 since deposited on 2021-10-21
3last month
1last week
Acq. date: 2026-08-10
Citations