Authors

Granata, Stefano; Bearda, Twan; Dross, Frederic; Gordon, Ivan; Poortmans, Jef; Mertens, Paul

Conference

Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS

Title

Improved surface cleaning by in situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cells

Publication type

Proceedings paper

Embargo date

9999-12-31