Show simple item record

Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

dc.contributor.authorGrella, Luca
dc.contributor.authorCarroll, Alan
dc.contributor.authorMurray, Kirk
dc.contributor.authorMcCord, Mark A.
dc.contributor.authorTong, William M.
dc.contributor.authorBrodie, Alan D.
dc.contributor.authorGubiotti, Thomas
dc.contributor.authorSun, Fuge
dc.contributor.authorKidwingira, Francoise
dc.contributor.authorKojima, Shinichi
dc.contributor.authorPetric, Paul
dc.contributor.authorBevis, Christopher F.
dc.contributor.authorVereecke, Bart
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorMane, Anil U.
dc.contributor.authorElam, Jeffrey W.
dc.date.accessioned2021-10-21T08:00:22Z
dc.date.available2021-10-21T08:00:22Z
dc.date.issued2013
dc.identifier.issn1537-1646
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22430
dc.sourceIIOimport
dc.titleDigital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography
dc.typeJournal article
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorHaspeslagh, Luc
dc.identifier.doi10.1117/1.JMM.12.3.031107
dc.source.peerreviewyes
dc.source.beginpage31107
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.issue3
dc.source.volume12
dc.identifier.urlhttp://nanolithography.spiedigitallibrary.org/article.aspx?articleid=1724607
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record