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Manufacturing challenges of directed self-assembly
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Authors
Gronheid, Roel
;
Rincon Delgadillo, Paulina
;
Younkin, Todd
;
Chan, BT
;
Van Look, Lieve
;
Pollentier, Ivan
;
Nealey, Paul
Conference
AVS 60th International Symposium & Exhibition
Title
Manufacturing challenges of directed self-assembly
Publication type
Meeting abstract
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