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Conference contributions
DSA as a complementary lithography technique for contact hole patterning
Publication:
DSA as a complementary lithography technique for contact hole patterning
Date
2013
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gronheid, Roel
;
Singh, Arjun
;
Sayan, Safak
;
Vandenbroeck, Nadia
;
Chan, BT
;
Vandenberghe, Geert
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1929
since deposited on 2021-10-21
Acq. date: 2025-10-24
Citations
Metrics
Views
1929
since deposited on 2021-10-21
Acq. date: 2025-10-24
Citations