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Material influences on process performance in chemo-epitaxy directed self-assembly integration

dc.contributor.authorGronheid, Roel
dc.contributor.authorVan Look, Lieve
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorCao, Yi
dc.contributor.authorLin, Guanyang
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-21T08:02:35Z
dc.date.available2021-10-21T08:02:35Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22438
dc.sourceIIOimport
dc.titleMaterial influences on process performance in chemo-epitaxy directed self-assembly integration
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.source.peerreviewyes
dc.source.conferenceInternational Conference on Photopolymer Science and Technology - ICPST-30
dc.source.conferencedate25/06/2013
dc.source.conferencelocationChiba Japan
imec.availabilityPublished - imec


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