Understanding design-patterning interactions
dc.contributor.author | Gupta, Puneet | |
dc.contributor.author | Mallik, Arindam | |
dc.contributor.author | Torres, Juan Andres | |
dc.date.accessioned | 2021-10-21T08:03:40Z | |
dc.date.available | 2021-10-21T08:03:40Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22442 | |
dc.source | IIOimport | |
dc.title | Understanding design-patterning interactions | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Mallik, Arindam | |
dc.contributor.orcidimec | Mallik, Arindam::0000-0002-0742-9366 | |
dc.source.peerreview | no | |
dc.source.conference | SPIE Course | |
dc.source.conferencedate | 24/02/2013 | |
dc.source.conferencelocation | ||
imec.availability | Published - imec |
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