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Boron and phosphorus doping of naanocrystalline diamond films: Growth and applications

dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-21T08:05:47Z
dc.date.available2021-10-21T08:05:47Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22450
dc.sourceIIOimport
dc.titleBoron and phosphorus doping of naanocrystalline diamond films: Growth and applications
dc.typeOral presentation
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conference7th International Conference on New Diamond and Nano Carbons
dc.source.conferencedate19/05/2013
dc.source.conferencelocationClarke Quay Singapore
imec.availabilityPublished - imec


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